STOCK CODE: 300706

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  • Planar Alloy Sputtering Target
  • Planar Alloy Sputtering Target
  • Rotary Alloy Sputtering Target
  • Rotary Alloy Sputtering Target
  • Rotary Alloy Sputtering Target

Planar Alloy Sputtering Target

Excellent properties such as high purity, high density, Good composition uniformity, Uniform grain, etc.

High purity: The metal target requires very high purity, to ensure the stability and reliability of the material.We have various purity levels to suit your specific requirements, with the minimum purity of 99.5% up to 99.9999% for some metals. Also have controlled specific impurities within the target

High density: Metal targets have high density characteristics, usually up to 99%, to ensure the stability and quality of materials.

Uniform grain: Controlled grain size and direction

Good composition uniformity: the component distribution is uniform, ensure the film formation rate is uniform, film quality.


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  • * Maximum sizes of planar target    

       Thickness: 30mm (can be 60mm for round target)    

       Width: max 2000mm    

       Length: max 4000mm    


    * Maximum sizes of rotary target    

       Vacuum/Air Spraying    

            Backing tubes: ID56 x OD64 x Length300~3000mm, Thickness: 3~5mm    

            Backing tubes: ID78~83 x OD89~92 x Length300~3000mm, Thickness: 3~7mm    

            Backing tubes: ID100 x OD108 x Length300~3000mm, Thickness: 3~8mm    

            Backing tubes: ID125 x OD133 x Length300~4000mm, Thickness: 3~13mm    

       Bonding    

            Backing tubes: ID125 x OD133 x Length500~4000mm, Thickness: 8~13mm    


    * Planar/Rotary target can be customised as per your request.    

Chemical FormulaPurityFormsSpecification
Si+Al99.9% / 99.99%Planar / RotaryCustomized
Ni+Cr99.8% / 99.99%PlanarCustomized
Ti+Al99.6% / 99.9%PlanarCustomized
Al+Sc99.99%PlanarCustomized
In+Sn99.99%PlanarCustomized
Al Alloy99.99% / 99.999% / 99.9995%PlanarCustomized
Ag Alloy99.99% / 99.995%PlanarCustomized
Au Alloy99.99% / 99.999%PlanarCustomized
Cu Alloy99.99% / 99.999%PlanarCustomized
Mo Alloy99.95%PlanarCustomized
Ni Alloy99.99%PlanarCustomized
Si Alloy99.99%Planar / RotaryCustomized

Core competencies

  • Brand advantage

    Brand advantage

  • Strategic advantage

    Strategic advantage

  • R & D and talent stock advantage

    R & D and talent stock advantage

  • Supply chain advantage

    Supply chain advantage

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Certificate

  • IATF16949

    IATF16949

  • ISO9001

    ISO9001

  • ISO14001

    ISO14001

  • IATF16949-2016

    IATF16949-2016

  • IATF16949-2016

    IATF16949-2016

  • ISO45001-2018

    ISO45001-2018

  • ISO45001

    ISO45001

  • Indium Tin Oxide for REACH225

    Indium Tin Oxide for REACH225