STOCK CODE: 300706

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  • Planar Targets, Planar Sputtering Targets
  • Rotary Metal Sputtering Targets

Planar Metal Sputtering Targets

Excellent properties such as high purity, high density, high thermal conductivity, high stability, uniform grain, etc.

High purity: The metal target requires very high purity, to ensure the stability and reliability of the material.We have various purity levels to suit your specific requirements, with the minimum purity of 99.5% up to 99.9999% for some metals. Also have controlled specific impurities within the target

High density: Metal targets have high density characteristics, usually up to 99%, to ensure the stability and quality of materials.

Uniform grain: Controlled grain size and direction

Good composition uniformity: the component distribution is uniform, ensure the film formation rate is uniform, film quality.


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  • Manufacturing processes

    Manufacturing processes depend on the properties of the target material and its application.

    We have (Vacuum melting, Rolling, Vacuum spraying, Atmospheric spraying, Vacuum hot pressing, Hot Isostatic Pressing (HIP), Cold Isostatic Pressing +Various atmosphere sintering technology, Low temperature metal, Vacuum hot pressing sintering technology, Electron beam melting, Zone melting purification, Vacuum directional solidification technology, etc).

     

    For metal and alloy target, we adopt Vacuum melting, Rolling, Low temperature metal,Vacuum hot pressing sintering, Electron beam melting, Zone melting purification, Vacuum directional solidification technology.


  • Both Planar and Rotary target available

    Planar target

    Planar targets mainly refer to circular targets and rectangular targets with certain thickness. The plane target material is connected with sputtering equipment by means of thread, the sputtering film layer is attached to the substrate under vacuum conditions, and then the film is processed by various methods to meet different needs.

     

    Rotary target
    Rotary target is a magnetically controlled target. The target is shaped like a cylinder containing a stationary magnet for rotation. Its advantage is high utilization rate, the disadvantage is high cost.


    Reference size

    * Maximum sizes of planar target

       Thickness: 30mm (can be 60mm for round target)

       Width: max 2000mm

       Length: max 4000mm

     

    * Maximum sizes of rotary target

       Vacuum/Air Spraying

       Backing tubes: ID56 x OD64 x Length300~3000mm, Thickness: 3~5mm

       Backing tubes: ID78~83 x OD89~92 x Length300~3000mm, Thickness: 3~7mm

       Backing tubes: ID100 x OD108 x Length300~3000mm, Thickness: 3~8mm

       Backing tubes: ID125 x OD133 x Length300~4000mm, Thickness: 3~13mm

      

     Bonding

     Backing tubes: ID125 x OD133 x Length500~4000mm, Thickness: 8~13mm


    * Maximum sizes of planar target

       Thickness: 30mm (can be 60mm for round target)

       Width: max 2000mm

       Length: max 4000mm

     

    * Maximum sizes of rotary target

       Vacuum/Air Spraying

       Backing tubes: ID56 x OD64 x Length300~3000mm, Thickness: 3~5mm

       Backing tubes: ID78~83 x OD89~92 x Length300~3000mm, Thickness: 3~7mm

       Backing tubes: ID100 x OD108 x Length300~3000mm, Thickness: 3~8mm

       Backing tubes: ID125 x OD133 x Length300~4000mm, Thickness: 3~13mm

      

     Bonding

     Backing tubes: ID125 x OD133 x Length500~4000mm, Thickness: 8~13mm

Planar/Rotary target can be customized as per your request.

Chemical FormulaPurityFormsSpecification
Al99.99% / 99.999% / 99.9995%Planar / RotaryCustomized
Ag99.99% / 99.995% / 99.999%Planar / RotaryCustomized
Au99.99% / 99.999%PlanarCustomized
Cu99.97% / 99.99% / 99.999%Planar / RotaryCustomized
Cr99.5% / 99.95%Planar / RotaryCustomized
C99.99%Planar / RotaryCustomized
Co99.9%PlanarCustomized
Fe99.99%PlanarCustomized
Ge99.999%PlanarCustomized
Hf99.9%PlanarCustomized
In99.99%Planar / RotaryCustomized
Mg99.99%PlanarCustomized
Mo99.95%Planar / RotaryCustomized
Nb99.95%Planar / RotaryCustomized
Ni99.9% / 99.99%PlanarCustomized
Si99.99% / 99.999%Planar / RotaryCustomized
Sc99.99%PlanarCustomized
Sn99.99%Planar / RotaryCustomized
Ta99.99%Planar / RotaryCustomized
Ti99.6% / 99.99% / 99.995%Planar / RotaryCustomized
W99.95%PlanarCustomized
Zr99.60%Planar / RotaryCustomized

Core competencies

  • Brand advantage

    Brand advantage

  • Strategic advantage

    Strategic advantage

  • R & D and talent stock advantage

    R & D and talent stock advantage

  • Supply chain advantage

    Supply chain advantage

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Certificate

  • IATF16949

    IATF16949

  • ISO9001

    ISO9001

  • ISO14001

    ISO14001

  • IATF16949-2016

    IATF16949-2016

  • IATF16949-2016

    IATF16949-2016

  • ISO45001-2018

    ISO45001-2018

  • ISO45001

    ISO45001

  • Indium Tin Oxide for REACH225

    Indium Tin Oxide for REACH225